环形束斑冷阴极电子枪的研制及其束流品质优化

环形束斑冷阴极电子枪的研制及其束流品质优化 Development and beam quality optimization of annular beam spot cold cathode electron gun 桑兴华 SANG Xinghua 1 first-author 许海鹰 XU Haiying 1 2 杨波 YANG Bo 1 王壮 WANG Zhuang 1 彭勇 PENG Yong 2 中国航空制造技术研究院高能束流发生器实验室 中国航空制造技术研究院高能束流发生器实验室 Science and Technology on Power Beam generator Laboratory,AVIC Manufacturing Technology Institute Science and Technology on Power Beam generator Laboratory,AVIC Manufacturing Technology Institute 南京理工大学材料科学与工程学院 南京理工大学材料科学与工程学院 School of Materials Science and Engineering,Nanjing University of Science and Technology School of Materials Science and Engineering,Nanjing University of Science and Technology 电子束熔丝增材制造技术适用于大中型金属构件的高效整体化成形,针对目前用于熔丝增材制造的电子枪存在的诸多缺点,设计了一种环形束斑冷阴极电子枪,建立了三维模型,对束源关键部件结构尺寸进行模拟仿真,当阴极弧面半径100 mm,阳极倾角40°时束流品质最优;根据模拟仿真结果加工制造了电子枪,经测试,其耐压可达-22 kV,最大束流可达1 250 mA;选用直径2 mm的TC4焊丝在加速电压-20 kV、束流210 mA、工作台移动速度310 mm/s、送丝速度30 mm/s下进行熔丝实验,获得了良好的表面成形质量。 Electron beam fuse additive manufacturing technology is suitable for efficient integrated forming of large and medium-sized metal components. Aiming at the many shortcomings of electron guns currently used for additive manufacturing,an annular beam spot cold cathode electron gun was designed,a three-dimensional model was established,and the structural dimensions of the key components of the beam source were simulated. When the radius of the cathode arc is 100 mm and the anode inclination angle is 40°,the beam quality is the best. According to the simulation results,the actual electron gun was manufactured. After testing,the designed electron gun can withstand voltage up to -22 kV and beam current up to 1250 mA. The 2 mm diameter TC4 welding wire was selected for fuse test with accelerating voltage of -20 kV,beam current of 210 mA,table moving speed of 310 mm/s and wire feed speed of 30 mm/s, and a good surface forming quality is obtained. 电子束熔丝增材制造 环形束斑 冷阴极电子枪 钛合金 electron beam fuse additive manufacturing annular beam spot cold cathode electron gun titanium alloy TG661 国家自然科学基金（51775527）;国防基础科研计划（JCKY2017205A002） 2022-03-08 8 51