Aiming at the disadvantages of domestic electron beam deflection scanning coils such as low magnetic field strength,poor uniformity,and slow scanning speed,based on the working principle of the Helmholtz coil,the electron beam deflection scanning coil is designed with a hollow structure.The circuit topology of push and pull of output voltage is proposed,which doubles the driving voltage of the scanning coil,thereby increasing the speed of change of the driving current of the scanning coil. The current Hall sensor and PID adjustment circuit are used to design the driving current closed-loop control circuit,and the Lab View software is used to develop the electron beam high-speed scanning control program. The results show that the magnetic field intensity and uniformity of the scanning coil of the electron beam high-speed scanning system can meet the requirements of large-angle electron beam deflection scanning. The optimized design of the scanning coil drive circuit effectively increases the rate of change of the driving current and can realize high-speed electron beam scanning.
electron beamhigh-speed scanningdeflection scanning coildrive circuit